Neutronix/Quintel UL 7000 Mask Aligner
- 365 nm and 405 nm exposures at approximately 20 mW/cm2
- 254 nm and 310 nm exposures at approximately 5 mW/cm2
- Front side and backside alignment
- Substrate geometries
- 4" diameter
- 5" square
- 6" diameter
- good versatility on substrate thickness and geometry
- Mask geometries
- 5" square
- 7" square
- 9" square
- 1:1 copies of 5" substrate and mask
- Print submicron features